OEM  PARTS   LIST
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OEM–¼F @ADVANCED ENERGY
# P/N OEM DISCRIPTION
1 3155168-001  ADVANCED ENERGY  SOURCE, RF MATCH 
2 3156024-1058  ADVANCED ENERGY  PDX 500 CONTROLLER 
3 3157510-002B  ADVANCED ENERGY  CONTROLLER, GENERATOR (MODEL PEP-5000) 
4 660-024637-008  ADVANCED ENERGY  ADVANCED ENERGY RF GEN. 
5 A3M3K000EA120B001A  ADVANCED ENERGY  APEX3513 GENERATOR 
6 A3M5K000EA120B001A  ADVANCED ENERGY  APEX3513 GENERATOR 
7 FC-260J B2H6/N2  ADVANCED ENERGY  MFC FC-260J 0.8%B2H6/N2 3SLM 
8 FC-260J N2 6SLM  ADVANCED ENERGY  MFC, FC-260J 
9 FC-260J S1H4/N2  ADVANCED ENERGY  MFC, FC-260J 20%SIH4/N2 1SLM 
10 FC-261J O2 10SLM  ADVANCED ENERGY  MFC 
11 MDX-10K  ADVANCED ENERGY  MDX POWER SUPPLY