OEM  PARTS   LIST
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OEM–¼F @AERA 
# P/N OEM DISCRIPTION
@ FC-7710  AERA  FLOW SWITCH 
@ FC-980C  AERA  MFC MC-2100NC-CH3F-20SCCM 
@ PS-71DA  AERA  POWER SUPPLY 
@ PS-76DA  AERA  POWER SUPPLY