OEM  PARTS   LIST
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OEM–¼F @MRC 
# P/N OEM DISCRIPTION
1 01-121-025 MRC  LAMP 60V 1.2W
2 01-151-025 MRC  P/B SWITCH
3 014-00-81 MRC  POWERSUPPLY 5V 6A MANA
4 1002961 MRC  O-RING, DOOR SEAL
5 1005009 MRC  VALVE CHECK BR
6 1005048 MRC  FITTING, MANA BLK 3/4
7 1011490 MRC  POWER SUPPLY, 24VDC/35A SW, MODEL MK750 (NJE)
8 1011879 MRC  RING,OUTER QUARTZ
9 1011884 MRC  COLLAR, QUARTZ
10 1011907 MRC  BEARING, PLATE DOOR
11 1011926 MRC  SMITCH DOOR, FLAG
12 1011929 MRC  SHIM,DOOR
13 1011930 MRC  SHIM, DOOR
14 1011986 MRC  SET SCREW,TFE
15 1012038 MRC  SCREW, PIN ADJUST
16 1012039 MRC  GUIDE,SS SPRING
17 1012398 MRC  HOLDER, QUARTZ
18 1012402 MRC  FEEDTHRU, TEFLON RING
19 1012406 MRC  BLOCK,TFE,(RFFOTHR)
20 1012407 MRC  BLOCK,TFE,(RFFOTHR)
21 1012414 MRC  ELECTRODE, DUMMY
22 1012419 MRC  SCREW, M5 X 8 CERAMIC
23 1012506 MRC  BEARING, 629
24 1012545 MRC  SWITCH, MICRO SS-01W5
25 1012657 MRC  BEARING, LM, 8SUU, (HST)
26 1012833E MRC  LAMP, UV
27 1013719 MRC  PEN, LIGHT ASSY
28 1014340 MRC  SENSOR, WINDOW
29 1014343 MRC  SENSOR, WAFER, ASSY
30 1014348 MRC  ASSY LASER NWS
31 1014915 MRC  PLATE SUPPORT LIFTER
32 1015416 MRC  SWITCH, MICRO, 39-701
33 1015981 MRC  RING CURTAIN,QUARTZ
34 1016391 MRC  SWITCH,STOP,AUTO
35 1016698 MRC  RING,OUTER
36 1016737 MRC  SLEEVE,DEPOSITION SHIELD
37 1017720 MRC  TUBE, QUARTZ
38 1018229 MRC  PLATE, GDS SUPPORT
39 1018662 MRC  PIN ALIGNMENT
40 1018692 MRC  SW,MICRO,CHAM LID
41 1020250 MRC  SOCKET HEAD CAP SCREW VENTED
42 1020470 MRC  BANNER APERATURE
43 1020826 MRC  SUPPORT,HIGH VOLT. FEED THRU
44 1020827 MRC  SUPPORT,HIGH VOLTAGE,WIRE
45 1020828 MRC  FIXTURE HIGH VOLTAGE,WIRE
46 1020854 MRC  BOLT,HOT,PLATE,SETTING (1)
47 1021823 MRC  WASHER,HOT,PLATE
48 1024597 MRC  COLLAR
49 1024598 MRC  COLLAR, INSULATION HP
50 110C-110 MRC  SWITCH FLOW CELCON BODY
51 112-55-000 MRC  PCB ASSY ORIENTER DISPLAY
52 115690001 MRC  RELAY, RECIRC, CONTROL
53 135-12-001 MRC  RELAY, K1-15, CDO
54 137-24-001 MRC  GAUGE, 160PSI, 1/8MNPT
55 18-013-252 MRC  LINK BALL
56 18-325-001 MRC  SOLENOID ACTUATOR
57 192-90-002 MRC  CU.ANODE,FLAT,300 PRAXAIR
58 20-205Z-CU136-0150 MRC  TARGET SPTRG AL/SI/CU
59 20-554F-AL256-0065 MRC  TARGET, TITANIUM, ULTRAGRADE RMX ECLIPSE TGT
60 20-557D-TI000-7000 MRC  SUPERSTEP
61 20554KAL1557-012 MRC  TITANIUM CCH-DO SPEC RMX
62 20557DT10018000 MRC  METAL SEAL
63 2090680 MRC  SEAL, METAL V4
64 2090990 MRC  SEAL METAL
65 2091080 MRC  SEAL, METAL
66 2091230 MRC  ENCODER ASM,CHUCK DRIVE
67 174619 MRC  CONNECTOR
68 299-03-80 MRC  METAUX
69 30-554BS1071012 MRC  PRESSURE SWITCH
70 3012410 MRC  SWITCH, VACUUM (MATERIALS RES.)
71 3013060 MRC  FLOW METER 0-1 LPM
72 3050016 MRC  BUSHING SHLDR CERAMIC
73 305120P MRC  BELT
74 3100630 MRC  CKT BKR 4 AMP
75 3102140 MRC  CIRCUIT BREAKER 10 A
76 3102170 MRC  FUSE 1 AMP
77 310221P MRC  RES. 3.7 MEG-OHM 2%
78 3140090 MRC  RES. .37.4K OHM 2W 3%
79 3140100 MRC  CHOKE PLATE
80 3150850 MRC  CAPACITOR
81 316116P MRC  PINS
82 317072P MRC  LUG RD PAN PV
83 317174P MRC  WIRE PAL SENSE 12 AWG
84 319341 MRC  MOD ASSY, SBX TTL I/O CONTROL
85 3310420 MRC  FITTING TOP OUTER MNFLD (SS)
86 359B0003-01 MRC  FITTING TOP OUTER NANIFOLD
87 359B0003-501 MRC  FTNG MANIFOLD (MATERIALS RES.)
88 359B0007-01 MRC  VG C+LR 340, IG-DEGAS BCD
89 4053260 MRC  PIPING
90 501022 MRC  TWAS, GROUND SHIELD
91 501998 MRC  RING UPPER SHIELD
92 502000 MRC  TWAS, GROUND SHIELD
93 502016 MRC  ABSORBER SHOCK
94 5020930 MRC  SW ASSY (MRC)3
95 5020970 MRC  INNER SHIELD
96 502115 MRC  2-WAY VALVE 1 15V
97 5030680 MRC  PRESSURE SWITCH W/SNUBBER
98 5032200 MRC  NYLNYLONTUBE-11, NATURAL, SUPER-FLEX
99 505063P MRC  GASKET, NI 1/4 2/2UM FILTER
100 5110410 MRC  TWAS, UPPER SHIELD
101 511970 MRC  TWAS, GROUND SHIELD
102 517594 MRC  BEARING, BALL IDLER GEAR
103 6041350 MRC  GEAR IDLER 1/4 SHAFT SS SPACER
104 6050120 MRC  SPACER 3/8 X 9/16 X 3/32
105 6050520 MRC  PIN ROLL SS 1/8 X 3/8 (MATERIALS RESEARCH)
106 605137P MRC  SCREW, SHC SS 10-32X7/8
107 607290P MRC  SCR SPH SS 10/32 X 3/8 (MATERIALS RESEARCH)
108 607416P MRC  SCREW, BIND HD 3-56 X 3/16
109 607657P MRC  WASHER FLAT SS # 6
110 608062P MRC  WASHER, FLAT 3/4"
111 608073P MRC  WASHER INT LOCK CP # 2
112 608133P MRC  WASHER SPLIT LK SS # 10
113 608154P MRC  RING, RET. 3/8 DIA. SHAFT
114 612006P MRC  DCS
115 6220490 MRC  SLAT
116 813-28-506 MRC  SHUTTER FEEDTHRU
117 813-28-950 MRC  CDO,FLANGE,KF50,UPPER,(PFA)
118 814-06-013 MRC  CDO, FLANGE, KF50, LOWER, PFA
119 814-06-014 MRC  ASSY RF MUTE CKT
120 882-96-000 MRC  ASSY, ECLIPSE LOW OPTICAL INTERFACE
121 884-01-000 MRC  PCB, RF DRIVE
122 884-07-000 MRC  PCB,STEPCONTI/F
123 884-55-000 MRC  PCB, REACTIVE GAS
124 884-59-000 MRC  PCB, PROCESS CONTROL INTERFACE
125 885-11-000 MRC  PCB, DIGITAL I/O
126 885-24-000 MRC  SENSOR
127 89-401-036 MRC  SENSOR
128 89-401-411 MRC  SCREW, PHD, VENT (PACK OF 10)
129 A110314 MRC  FLANGE CYLINDER ROD
130 A110320 MRC  FLANGE CYLINDER ROD
131 A110320 MRC  DRIVIN SHAFT
132 A110886 MRC  DRIVE SHAFT
133 A110887 MRC  O-RING
134 A111195 MRC  ASSY, INBTERLOCK SW
135 A112414 MRC  SCREW-DICRONITE, SFHD (PACK OF 10)
136 A112552 MRC  CABLES ASSY C.A. PNL/CAT. INT'LK
137 A112666 MRC  ACTUUATOR ASSY CLAMO(LONG)
138 A112868 MRC  SPUR GEAR
139 A112921 MRC  SPUR GEAR 48P 1351 3/16 F SS
140 A112922 MRC  SPUR GEAR
141 A112923 MRC  SCREW, CT PAN HD
142 A113032 MRC  ASSM ALIGNMENT BAR
143 A113816 MRC  LOCATOR "FROG LEGS"
144 A113850 MRC  ORIFICE
145 A114547 MRC  POWER SUPPLY
146 A115105 MRC  RETAINER NUT REMOVAL TOOL
147 A115229 MRC  POWER SUPPLY (MRC)
148 A115430 MRC  ASSY FIXTURE WH 4-PIN
149 A115553 MRC  RING, FILLER, AL, 200MM
150 A116051 MRC  SCREW, SOC HD 10/32 X 7/8 DICRONITE
151 A116926 MRC  CABLE 30
152 A117287 MRC  REMOTE SCANNER (EMITTER) (MATERIALS RES.)
153 A118734 MRC  VALVE, MANF WLDMT ASSY
154 A120405 MRC  MAGNET PACK ASSY
155 A120634 MRC  30' RF CABLE
156 A120692 MRC  CABLE PDP-2500
157 A121232 MRC  CABLE, SOFT ETCH FAN (115 VAC) (MOD# Cl2l2)
158 A121247 MRC  SOFT ETCH GROUND STRAP
159 A121276 MRC  STRAP, S/E COIL HV
160 A121277 MRC  STRAP, S/E COIL HV
161 A121277 MRC  ALIGN ASSY GAUGE
162 A121554 MRC  BEARING
163 A122026 MRC  C/A, INTLK SW
164 A122074 MRC  CABLE, POD INTLK, SP-1
165 A122075 MRC  BASE, WELDMENT, WAFER HOLDER
166 A122119 MRC  BASE, WELDMENT, WAFER HOLDER
167 A122119 MRC  C/A, 2 CO CATHOSED COVER INTLK
168 A122134 MRC  GASKET, 12IN
169 A123166 MRC  ASSY, FIXT ETCH SHIELD, AL GT, 150MM
170 A123572 MRC  ASSY, FIXT ETCH SHIELD, AL, GT 150MM
171 A123582 MRC  ASSY, ADAPTOR
172 A126809 MRC  RF MATCH NETWORK
173 AL159T MRC  ACTIVATOR TIP (MATERIALS RES)
174 D101892 MRC  BRACKET LONG RF STRAP 3"
175 D112607 MRC  SHIELD RING, HEATER 150MM AL
176 D112647 MRC  TRANSFER ARM TOOL
177 D113712 MRC  SPRING REST
178 D115019 MRC  TARGET RETAINER
179 D115219 MRC  INSULATOR, SUPERSTEP CATHODE
180 D115222 MRC  POD SHIELD FULL
181 D115238 MRC  SPUT, 150MM PIEPAN SS
182 D115298 MRC  HOUSING, WAFER HOLDER
183 D115512 MRC  GASKETS FOR POD SHIELD
184 D115634 MRC  CAP ANODE SLEEVE (MATERIALS RES)
185 D115853 MRC  SHIELD, PIE PAN SOFT
186 D116-700-723 MRC  FILTER RING ASSY, 200MM
187 D116050 MRC  PCB ASSY MICROPROCESSOR BOARD
188 D116058100 MRC  PCB ASSY MICROPROCESSOR BOARD
189 D116058100 MRC  CLAMP INSULATING
190 D116336 MRC  SHIELD, GATE VALVE
191 D116375 MRC  SHIELD, WAFER RING
192 D116700 MRC  POD SHIELD
193 D116931 MRC  CLIP, RETAIN (PACK OF 10)
194 D117572 MRC  INSULATOR THERMOCOUPLE UPPER
195 D117641 MRC  INSULATOR, CATHODE, RMS-10
196 D117750 MRC  SPRING CLAMP HOLDER (MATERIALS RES)
197 D117811 MRC  ANODE INSULATOR
198 D118260 MRC  SHIELD,CAT ADAPTOR,RMA-12
199 D119118 MRC  SHIELD, DOOR CORNER, RMX-12, SS
200 D119451 MRC  SHIELD, SOFT ETCH
201 D119692 MRC  SHIELD,RING HTR,150,AL,MXB
202 D121115 MRC  SHLD,GATE VLVE SPACER,SS,UHV
203 D121510 MRC  PLATE, SW MTG
204 D122071 MRC  RING, SEAL, SHORT TAB
205 D122988 MRC  RING, SEAL, SHORT TAB
206 D122988 MRC  SHIELD, GATE VALVE SPACER
207 D123611 MRC  SHIELD, GATE VALVE STAINLESS
208 D123611-S MRC  ADPTR, SHLD
209 D12481-S MRC  SHIELD, CORNER
210 D124822-S MRC  SHIELD, CATHODE ADAPTER
211 D124838S MRC  SHIELD RING, GAS DIST, PLAS, ICC 205691
212 D125243-SP MRC  POD SHIELD,SPA-12
213 D125302-SS-R MRC  SHIM RF FINGER (MATERIALS RES)
214 D126673 MRC  ADPTR, SHLD
215 D12841-A MRC  LAMP LED SII 05EG (MATERIALS RES)
216 WC9-5004 MRC  @