OEM  PARTS   LIST
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OEM–¼F @VLSI STANDARD 
# P/N OEM DISCRIPTION
1 03A-04-181  VLSI STANDARD  WAFER, CALIBRATION, SF6200 
2 450-01083-00  VLSI STANDARD  PCB, VME SI0 CMP 
3 65-00023  VLSI STANDARD  GEAR,20TH BRASS WORM 
4 65-00064  VLSI STANDARD  CONNECTOR,RF 
5 65-00105  VLSI STANDARD  BELLOWS ASSEMBLY 
6 65-00182  VLSI STANDARD  SHIELD,CERAMIC CONTACT/RT 
7 65-00187  VLSI STANDARD  AXLE, INCONEL E/G 6" .500 
8 65-00189  VLSI STANDARD  BLOCK,CERAMIC 
9 880A  VLSI STANDARD  STANDARD FAC 6881 ALPHA STEP 
10 ACS-1425  VLSI STANDARD  WAFER, CALIBRATION 120A 
11 ACS5-0.269  VLSI STANDARD  WAFER, CALIBRATION 2869-001 
12 ACS5-0.496  VLSI STANDARD  WAFER, CALIBRATION 2969-001 
13 ACS5-1.112  VLSI STANDARD  WAFER, CALIBRATION 2972-003 
14 ACS6-0.152C  VLSI STANDARD  CONTAMINATION STANDARD ABSOLUTE 
15 ACS6-0.798C  VLSI STANDARD  WAFER, CALIBRATION 3031-010 
16 ACS8-0.152C  VLSI STANDARD  STANDARD,152,TARGET,9000 
17 ACS8-0.496C  VLSI STANDARD  WAFER,CALIBRATION 
18 ACS8-4.000C  VLSI STANDARD  CONTAMINATION STANDARD ABSOLUTE 
19 ACS8-4.000C  VLSI STANDARD  CONTAMINATION STANDARD ABSOLUTE 
20 ASC-0.364CSPI  VLSI STANDARD  WAFER CALIBRATION SF6200 
21 FTS-5-1250  VLSI STANDARD  WAFER, CALIBRATION 1250A 
22 FTS-5-250  VLSI STANDARD  WAFER, CALIBRATION 250A 
23 FTS-5-4000  VLSI STANDARD  WAFER, CALIBRATION 4000A 
24 FTS-5-6750  VLSI STANDARD  WAFER, CALIBRATION 6750A 
25 FTS-5-9400  VLSI STANDARD  WAFER, CALIBRATION 9400A 
26 RS3-0.1  VLSI STANDARD  WAFER, CALIBRATION 2566-017 
27 RS3-0.9  VLSI STANDARD  WAFER, CALIBRATION 2925-005 
28 SCF-815-C350-6  VLSI STANDARD  FILM CARRIER 147 HOLE 6 
29 SCS-1402  VLSI STANDARD  WAFER, CALIBRATION 500A